Innovation

Ready for 450mm standard!

We are supporting the industry in 450mm innovation:

  • First 450mm EPI multi-pocket susceptor prototypes supplied successfully. §First 450mm RTP package developed with OEM.
  • Participating in European industry platforms: EEM450PR and E450EDL.
  • 450mm pocket wafer and Adapter Rings available to enable your future 450mm process and tool development.