RTP

  • Edge Ring and Wafer Support Cylinder for RTP Equipment

RTP Lamps

  • Infrared Lamps for EPI and RTP applications

RTP

8” RTP: AMAT Centura XE & Radiance

  • Edge Ring
  • Edge Ring flat type wafer
  • Adapter Ring (6”)
  • Edge Ring thin
  • Wafer Support Cylinder  

12” RTP: AMAT Radiance (+)  

RTP RadiancePlus chamber (Vantage)

  • Edge ring uni oxidized
  • Wafer support cylinder
  • ATM quartz disk (RE needed)

12” RTP: AMAT Radiance (+) 

RTP Radiance chamber (Centura)

  • Edge ring silicon coated
  • Wafer Support Cylinder
  • ATM quartz disk