MOCVD

Almost through the entire its existence, Xycarb has been producing wafer carriers for MOCVD systems. From the beginning of mass production in GaN onwards in the late 90’s Xycarb has been the clear market leader in consumable spare parts out of graphite and Silicon Carbide coated graphite. Through high machining accuracy and Xycarbs’ own developed unique CVD SiC coating process our customers have the benefit of reliable parts with consistent performance: within wafer , wafer to wafer and susceptor to susceptor.

Cooperating with Xycarb to enhance your III-V Epitaxy processes means getting wafer carriers that enable yield improvement and lifetime enhancement through combining your process  knowledge with Xycarbs vast experience in SiC coated graphite production and result oriented problem solving.

Veeco

Aixtron