ETCH

Targeted Solutions Reducing Your Cost of Ownership (CoO)

Critical Consumable Parts

  • Insert Rings, Focus Rings and Hot Edge Rings
  • Chamber Confinement Rings
  • Gas Distribution Plates
  • Electro Static Chucks (under development)

Broad scope of Material Offerings

  • Quartz
  • Silicon
  • Aluminium Oxide
  • Aluminium Nitride
  • Silicon Carbide
  • Sapphire