Application support

  • Enhanced designs increasing your yields
  • Optimizing parts for longer life time
  • Supporting your projects reducing Cost of Ownership

Total Repair Service for quartz chamber parts

  • Available for your sites, in all parts of the world at our Standard Global Specifications, ready for your Global Finger Printing programs

Parts for the entire Process Chamber

  • SiC Graphite
  • Quartz made available in easy ways for you to do business*
  • Lamps

* E.g. Consignment Programs, Special Packaging saving time in your Installation Process