Semiconductor Segment

  • Silicon Epitaxy (EPI): specialists for the entire process chamber and services
  • Silicon Dry Etch: targeted solutions reducing your Cost of Ownership (CoO)
  • Chemical & Physical Vapor Deposition (CVD & PVD): precision in ceramic chamber parts
  • Rapid Thermal Processing and Wafer Anneal (RTP/TRA) : efficiency by total solutions

LED / MOCVD Segment

  • Metal Organic Chemical Vapor Deposition (MOCVD) : setting the standard in Susceptors