RTP

Product name:
Edge ring and Wafer Support Cylinder for RTP Equipment

Product description:
Xycarb Cermics offers a complete package of consumables for RTP systems (like AMAT Centure XE+, Radiance and Radiance+) including Si coated SiC and quartz parts. With our in-house developed materials, Xycarb Ceramics manufactures very high purity parts. The in-house developed materials and precision machining capabilities, result in high performance of products in the RTP equipment.

Product detail:
Edge Rings made from Si coated SiC and full CVD non-transparant SiC material (ZTSiC) Wafer Support Cylinders (Opaque quartz with Si coating) Disks and pins (quartz) Infrared Lamps.